MOL
middle of the line
STI
shallow trench isolation
ILD
interlevel dielectric
UTSOI
ultrathin silicon-on-insulator
ETSOI
extremely thin silicon-on-insulator
LSOI
local silicon-on-insulator
RMG
replacement metal gate
MuGFET
multigate field effect transistor
LPCVD
low-pressure chemical vapor deposition
WID
within-die
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