Thursday, August 5, 2010

New 10 terms

BMO
butadiene monoxide

EP
ellipsometric porosimetry

TEFS
triethoxyfluorosilane

DFL
dielectric flash layer

TMSNB
trimethoxysilylnorbornene

TESNB
triethoxysilylnorbornene

TCS
tetra(trimethoxysilylethyl)cyclotetrasiloxane

ILD
interlayer dielectric

OPL
organic planarization layer

PSZ
pure silica zeolite

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